Plasma Technology for Advanced Devices

Plasma Processing, Diagnostics, and Etching


Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology, 7)
by Barry L. Stansfield, Hiroharu Fujita, Minoru Sugawara

Principles of Plasma Discharges and Materials Processing
by Michael A. Lieberman, Allan J. Lichtenberg

Glow Discharge Processes: Sputtering and Plasma Etching
by Brian Chapman

Principles of Plasma Diagnostics
by I. H. Hutchinson

Handbook of Advanced Plasma Processing Techniques
by R. J. Shul, S. J. Pearton

Dry Etching for VLSI
by A. J. Van, Roosmalen, A. J., Van Roosmalen, J. a. G., Baggerman

Wet/Dry Etch Overview
by Texas Engineering Extension Service

Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions
by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood

Plasma Etching: An Introduction (Plasma: Materials Interactions)
by Dennis M. Manos, Daniel L Flamm

Plasma etching and reactive ion etching
by J. W. Coburn

Etching in Microsystem Technology
by Michael Köhler

ICP Emission Spectrometry
by Joachim Nölte

The Physics and Technology of Ion Sources
by Ian G. Brown

Industrial Plasma Engineering
by J Reece Roth

Plasma Processes for Semiconductor Fabrication
by W.N.G. Hitchon

Plasma Diagnostics, Volume 2: Surface Analysis and Interactions
by Orlando Auciello (Editor), Daniel L. Flamm (Editor)

Fundamentals of Semiconductor Manufacturing and Process Control
by Gary S. May (Author), Costas J. Spanos


High Density Plasma Sources: Design, Physics, and Performance

by Oleg A. Popov (Editor)


Fundamentals of Plasma Physics

by Paul M. Bellan



Semiconductor Devices


Low-Voltage SOI CMOS VLSI Devices and Circuits
by James B. Kuo, Shih-Chia Lin

Physics of Semiconductor Devices
by S. M. Sze

Modern Semiconductor Device Physics
by S. M. Sze

Silicon Processing for the VLSI Era : Process Technology
by Stanley Wolf, Richard N. Tauber

Silicon Processing for the VLSI Era: Process Integration
by Stanley Wolf

Silicon Processing for the VLSI Era, Vol. 3 : The Submicron MOSFET
by Stanley Wolf

Silicon Processing for the VLSI Era: Volume 4 - Deep-Submicron Process Technology
by Stanley Wolf

Fundamentals of Modern VLSI Devices
by Yuan Taur, Tak H. Ning

Semiconductor Device Fundamentals
by Robert F. Pierret, Katherine Harutunian, Ben S. Bernanke

Semiconductor Material and Device Characterization
by Dieter K. Schroder

Interlayer Dielectrics for Semiconductor Technologies
by Shyam Muraka, Moshe Eizenberg, Ashok Sinha




The Science and Technology of Carbon Nanotubes
by Kazuyoshi Tanaka, Tokio Yamabee, Kenichi Fukui, T. Yamabe, K. Fukui

Carbon Nanotubes and Related Structures
by Peter J. F. Harris

Springer Handbook of Nanotechnology
by Bharat Bhushan

Molecular Electronics: Commercial Insights, Chemistry, Devices, Architecture and Programming
by James M. Tour

Future Trends in Microelectronics : The Nano Millennium
by Serge Luryi, Jimmy Xu, Alex Zaslavsky

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