Plasma Technology for Advanced Devices

Plasma Processing, Diagnostics, and Etching

 

Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology, 7)
by Barry L. Stansfield, Hiroharu Fujita, Minoru Sugawara


Principles of Plasma Discharges and Materials Processing
by Michael A. Lieberman, Allan J. Lichtenberg


Glow Discharge Processes: Sputtering and Plasma Etching
by Brian Chapman


Principles of Plasma Diagnostics
by I. H. Hutchinson


Handbook of Advanced Plasma Processing Techniques
by R. J. Shul, S. J. Pearton


Dry Etching for VLSI
by A. J. Van, Roosmalen, A. J., Van Roosmalen, J. a. G., Baggerman


Wet/Dry Etch Overview
by Texas Engineering Extension Service


Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions
by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood


Plasma Etching: An Introduction (Plasma: Materials Interactions)
by Dennis M. Manos, Daniel L Flamm


Plasma etching and reactive ion etching
by J. W. Coburn


Etching in Microsystem Technology
by Michael Köhler


ICP Emission Spectrometry
by Joachim Nölte


The Physics and Technology of Ion Sources
by Ian G. Brown


Industrial Plasma Engineering
by J Reece Roth


Plasma Processes for Semiconductor Fabrication
by W.N.G. Hitchon


Plasma Diagnostics, Volume 2: Surface Analysis and Interactions
by Orlando Auciello (Editor), Daniel L. Flamm (Editor)


Fundamentals of Semiconductor Manufacturing and Process Control
by Gary S. May (Author), Costas J. Spanos

 

High Density Plasma Sources: Design, Physics, and Performance

by Oleg A. Popov (Editor)

 

Fundamentals of Plasma Physics

by Paul M. Bellan

 

 

Semiconductor Devices

 

Low-Voltage SOI CMOS VLSI Devices and Circuits
by James B. Kuo, Shih-Chia Lin


Physics of Semiconductor Devices
by S. M. Sze


Modern Semiconductor Device Physics
by S. M. Sze


Silicon Processing for the VLSI Era : Process Technology
by Stanley Wolf, Richard N. Tauber


Silicon Processing for the VLSI Era: Process Integration
by Stanley Wolf


Silicon Processing for the VLSI Era, Vol. 3 : The Submicron MOSFET
by Stanley Wolf


Silicon Processing for the VLSI Era: Volume 4 - Deep-Submicron Process Technology
by Stanley Wolf


Fundamentals of Modern VLSI Devices
by Yuan Taur, Tak H. Ning


Semiconductor Device Fundamentals
by Robert F. Pierret, Katherine Harutunian, Ben S. Bernanke


Semiconductor Material and Device Characterization
by Dieter K. Schroder


Interlayer Dielectrics for Semiconductor Technologies
by Shyam Muraka, Moshe Eizenberg, Ashok Sinha

 

Nanotechnology

 

The Science and Technology of Carbon Nanotubes
by Kazuyoshi Tanaka, Tokio Yamabee, Kenichi Fukui, T. Yamabe, K. Fukui


Carbon Nanotubes and Related Structures
by Peter J. F. Harris


Springer Handbook of Nanotechnology
by Bharat Bhushan


Molecular Electronics: Commercial Insights, Chemistry, Devices, Architecture and Programming
by James M. Tour


Future Trends in Microelectronics : The Nano Millennium
by Serge Luryi, Jimmy Xu, Alex Zaslavsky

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