Plasma Technology for Advanced Devices

Event

Topics

Location

Date

Abstract Deadline

SPIE Advanced Lithography

Emerging Lithographic Technologies / Metrology, Inspection, and Process Control for Microlithography / Advances in Resist Materials and Processing Technology / Optical Microlithography / Design for Manufacturability

San Jose, California

24-29 February 2008

IEEE ISSCC 2008

Analog and Digital Circuits, Displays, Static, Dynamic, Non-volatile, and Read-only Memory, Signal Processing, Wireless Communication, Molecular, Organic, and Nano-electronics

San Francisco, California

8-12 February 2008

9th European AEC/APC

Integration of Metrology and Analytics into Production Tools, Data Management and Process Control, Sensors and Measurement Tools, Equipment / Process Fault Detection, Integrated Metrology

Tel-Aviv, Israel

31 March - 2 April 2008

213th ECS Meeting

Fullerenes, Nanotubes, and Carbon Nanostructures, Plasma Processing, Thermal Processing of Si-based CMOS Devices, and other topics

Phoenix, Arizona

18-22 May 2006

17 December 2007

2008 Symposia on VLSI Technology and Circuits

VLSI Devices and Processes, Quantum Effect Devices, New Materials, Advanced Lithography, Patterning Technologies, Process/Device Modeling, Digital, Analog,and Mixed Circuits, Memory Circuits

Honolulu, Hawaii

17-20 June 2008

8 January 2008

22-st Symposium on Plasma Physics and Technology

Tokamaks, Short lived plasmas, Laser plasmas, Low temperature plasma, Plasma technology

Praha, Czech Republic

16-19 June 2008

16 March 2008

35th IEEE Int. Conference on Plasma Science

Karlsruhe, Germany

15-19 June 2008

15 February 2008

IITC 2008

Dielectrics, CMP/Planarization, Metallization, Process Integration, Process Control/Modelling, Reliability, Interconnect Systems, System-on-a-Chip, Dry Processing, Alternative Interconnect

San Francisco, California

1-4 June 2008

1 January 2008

2008 Gordon Research Conference on Plasma Processing Science

Plasma in Biology and Medicine, Plasma in Hydrogen Production, Fuel Cells, Materials Treatment, Microplasmas, Atmospheric Pressure Plasma Chemistry, Plasma in Micro- and Nano- Technologies, Nano-Particles and Nano-Structure, Treatment of Materials

Mount Holyoke College
South Hadley, MA

13-18 July 2008

22 June 2008

61-st Gaseous Electronics Conference

Plasma and Nanotechnology, Biological and Emerging Applications, High Pressure Glow Discharges, Material Processing in Low Pressure Plasmas, Ionization, Dissociation, Slow Collisions, Lighting, Optical Diagnostics

University of Texas at Dallas

13-17 October 2008

13 June 2008

214-th ECS Meeting

Nanotechnology, Thin Films, Materials, Processes, and Reliability, SiGe:  Materials, Processing, and Devices, Electrochemistry of New Forms of Carbon, Nanostructure and Function of Fullerenes, Carbon Nanotubes, and Related Materials

Honolulu, Hawaii

12-17 October 2008

30 May 2008

AVS 55-rd International Symposium

AVS 55th International Symposium

From Nano to Astronomical: The Science & Technology of Materials, Interfaces, & Processing

Boston, Massachusetts

19-24 October 2006

14 May 2008

30th International Symposium on Dry Process (DPS 2008)

Plasma-, Photon-, Electron-, and Ion- Beam Induced Surface Reactions, Gas and Plasma Diagnostics, Process Technologies for Etching, CVD and Surface Treatment, MEMS, Nano Technologies and Bio-Applications, Equipment Technology for Dry Processes

Tokyo, Japan

26-28 November 2008

2008 IEDM

Electron Devices: Strained Silicon Devices, Hf-based Gate Dielectrics, Modeling and Simulation, Quantum Electronics & Compound Semiconductors, Nanoscale Phenomena Based Memories, and other topics

San Francisco, California

15-17 December 2006

t.b.d.

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