Plasma Technology for Advanced Devices

5/29/2003
Philips Electronics and , a Dutch start-up company, announce a partnership to develop and manufacture a novel maskless, electron beam based lithography tool. The technology uses an electron beam array with 13000 light sources. This array is essentially a MEMS device. This is the second announcement for a European lcompany that works on MEMS based novel lithography technologies within a few weeks. Earlier this months Intel announced a significant investment in of Sweden.


 

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