Plasma Technology for Advanced Devices

This page is dedicated to emerging patterning technologies. Traditional photolithography is facing increasing difficulties to provide the solutions to keep up with Moore's law at reasonable costs. Alternative technologies are moving more and more into the spotlight. Below is a compilation of information regarding some of them:


Extension of Traditional Lithography

Immersion Lithography

Double Patterning


Extreme Ultraviolet Lithography

News on EUV lithography


Maskless Lithography

SLM - Spatial Light Modulator



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